MEMS​

I-MEMS, emele i-MicroElectroMechanical Systems zincinci ze-micromachines ezenziwe ngamacandelwana phakathi kwe-1 ukuya kwi-100 ye-micrometer ngobukhulu (i-micrometer sisinye sesigidi semitha) kunye nezixhobo ze-MEMS ngokubanzi ziqala ngobukhulu ukusuka kwi-20 micrometers_cc781905-5cde-3194-bb3bd566b_158 (Izigidi ezingama-20 zemitha) ukuya kwimilimitha. Uninzi lwezixhobo ze-MEMS ngamakhulu ambalwa ama-microns kuwo wonke. Ngokuqhelekileyo ziquka iyunithi esembindini eqhuba idatha, i-microprocessor kunye namacandelo amaninzi asebenzisana nangaphandle njenge-microsensors. Kwezi zikali ezincinci, imithetho yefiziksi yeklasikhi ayisoloko iluncedo. Ngenxa yommandla omkhulu we-MEMS kumlinganiselo womthamo, iziphumo zomphezulu ezifana ne-electrostatics kunye nokumanzisa zilawula iziphumo zevolumu ezifana ne-inertia okanye ubunzima be-thermal. Ke ngoko, uyilo kunye nophuhliso lweMEMS lufuna amava athile kwintsimi kunye nesoftware ethile ethathela ingqalelo le mithetho ye-non-classical physics.

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I-MEMS iye yasebenza ngakumbi kumashumi ambalwa eminyaka edlulileyo emva kokuba inokwenziwa kusetyenziswa ubugcisa obulungisiweyo bokwenziwa kwesixhobo se-semiconductor, ebesiqhele ukusetyenziselwa ukwenza izinto zombane. Ezi zibandakanya ukubumba kunye ne-plating, i-etching emanzi (KOH, TMAH) kunye ne-etching eyomileyo (i-RIE kunye ne-DRIE), i-electric discharge machining (EDM), ukufakwa kwefilimu encinci kunye nobunye ubuchwepheshe obukwazi ukwenza izixhobo ezincinci kakhulu.

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Ukuba unombono omtsha we-MEMS kodwa awunazo izixhobo zoyilo ezikhethekileyo kunye/okanye ubuchule obufanelekileyo, singakunceda. Emva koyilo, uphuhliso kunye nolwakhiwo sinokuphuhlisa izixhobo zovavanyo ezilungiselelweyo kunye nesoftware yemveliso yakho yeMEMS. Sisebenza kunye neqela lamaziko asele esele enziwe akhethekileyo kwi-MEMS. Zombini i-150mm kunye ne-200mm iiwafers zicutshungulwa phantsi kwe-ISO/TS 16949 kunye ne-ISO 14001 ebhalisiweyo kunye neemeko ezihambelana ne-RoHS. Siyakwazi ukwenza uphando oluphambili, uyilo, uphuhliso, uvavanyo, isiqinisekiso, iprototyping kunye nomthamo omkhulu wemveliso yorhwebo. Ezinye izixhobo ezidumileyo ze-MEMS iinjineli zethu zinamava kuzo ziquka:

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• I-Accelerometers

• Iigyroscopes/ Gyros

• Iimagnethimitha

• Imayikrofoni

• Iiresonators

• MEMS yamehlo(ezinje ngeeprojektha zedijithali, zonke iiswitshi zefiber optic optical)

• Ii-Actuator ze-MEMSkunye neeSensors (ezifana ne-motion sensor, inzwa yoxinzelelo)

• Iinguqu zeRF kunye neeVaractors

• Abavuni baMandla

• Micro-Bolometers

 

Izinzwa ezincinci ze-MEMS kunye nee-activators zenze ukuba kusebenze okutsha kwiifowuni ezihlakaniphile, iitafile, iimoto, iiprojekti ... njl. kwaye zibaluleke kakhulu kwi-Intanethi yeZinto (IoT). Kwelinye icala, i-MEMS inikezela ngemingeni yobunjineli obukhethekileyo, kubandakanywa neenkqubo zokwenziwa kwezinto ezingekho mgangathweni, ukusebenzisana kweefiziksi ezininzi, ukudityaniswa nee-ICs, kunye neemfuno zokupakisha zesiko le-hermetic. Ngaphandle kweqonga loyilo elikhethekileyo le-MEMS, kaninzi kuthatha iminyaka emininzi ukuzisa imveliso ye-MEMS kwintengiso. Sisebenzisa izixhobo eziphambili ukuyila nokuphuhlisa iMEMS. I-Tanner MEMS Design isenza sibe ne-3D ye-MEMS yoyilo kunye nenkxaso yokwenziwa kwindawo enye edibeneyo, kwaye yenza kube lula ukudibanisa izixhobo ze-MEMS kunye ne-analog / i-mixed-signal processing circuitry kwi-IC efanayo. Iphucula ukwenziwa kwezixhobo ze-MEMS ngomatshini, i-thermal, i-acoustic, yombane, i-electrostatic, magnetic and fluid analysis. Ezinye izixhobo zesoftware evela kuCoventor zisinika amaqonga anamandla oyilo lwe-MEMS, ukulinganisa, ukuqinisekiswa kunye nenkqubo yokwenza imodeli. Iqonga le-Coventor lijongene nemingeni yobunjineli ethile ye-MEMS efana nokusebenzisana kwe-multi-physics, ukuhluka kwenkqubo, ukuhlanganiswa kwe-MEMS + IC, i-MEMS + iphakheji yokunxibelelana. Iinjineli zethu ze-MEMS ziyakwazi ukwenza imodeli kwaye zilinganise indlela yokuziphatha kwesixhobo kunye nokunxibelelana ngaphambi kokwenza ulwakhiwo lokwenyani, kwaye ngeeyure okanye iintsuku, banokwenza imodeli okanye balinganise iziphumo ebezinokuthatha iinyanga zokwakha kunye novavanyo kwilaphu. Ezinye zezixhobo eziphambili ezisetyenziswa ngabayili bethu be-MEMS zezi zilandelayo.

 

Ukulinganisa:

• Tanner MEMS Design Flow ukusuka Mentor

• MEMS+, CoventorWare, SEMulator3D evela kwiCoventor

• IntelliSense

• Imodyuli ye-Comsol ye-MEMS

• I-ANSYS

 

Ukuzoba imaski:

• I-AutoCAD

• Vectorworks

• Umhleli woYilo

 

Ukwenza imodeli:

• Ii-Solidworks

 

Ukubala, uhlalutyo, uhlalutyo lwamanani:

• UMatlab

• MathCAD

• Izibalo

 

Oku kulandelayo luluhlu olufutshane loyilo lweMEMS nomsebenzi wophuhliso esiwenzayo:

• Yenza imodeli ye-MEMS 3D ukusuka kuyilo

• Umgaqo woyilo wokujonga ukwenziwa kwe-MEMS

• Ukulinganisa umgangatho wenkqubo yezixhobo ze-MEMS kunye noyilo lwe-IC

• Gqibezela umaleko kunye noyilo lokubonwa kwejiyometri

• Ukuveliswa koyilo oluzenzekelayo ngeeseli zeparameterized

• Isizukulwana seendlela zokuziphatha zezixhobo zakho zeMEMS

• Uyilo lwemaski oluphezulu kunye nokuhamba kokuqinisekisa

• Ukuthunyelwa ngaphandle kweefayile zeDXF   

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I-MICROFLUIDICS

Uyilo lwethu lwesixhobo se-microfluidics kunye nemisebenzi yophuhliso ijolise ekwenziweni kwezixhobo kunye neenkqubo apho umthamo omncinci wolwelo uphathwa. Sinamandla okuyila izixhobo ze-microfluidic kwaye sibonelela ngeprototyping kunye ne-micromanufacturing yesiko elenzelwe usetyenziso lwakho. Imizekelo yezixhobo ze-microfluidic zizixhobo ze-micro-propulsion, ii-lab-on-a-chip systems, izixhobo ze-micro-thermal, ii-inkjet printheads kunye nokunye. Kwi-microfluidics kufuneka sijongane nolawulo oluchanekileyo kunye nokuguqulwa kwamanzi anyanzeliswa kwiingingqi ezingaphantsi kweemilimitha. Ulwelo luyashukuma, luxutywe, lwahlulwe kwaye lucutshungulwe. Kwiinkqubo ze-microfluidic ulwelo luyashukunyiswa kwaye lulawulwe kusetyenziswa ii-micropumps ezincinci kunye ne-microvalves kunye nokunye okunjalo okanye ngokungenzi nto kuthathelwe ithuba le-capillary forces. Ngeenkqubo ze-lab-on-a-chip, iinkqubo eziqhele ukuqhutywa kwilebhu zenziwa kancinci kwitshiphu enye ukuze kuphuculwe ukusebenza kakuhle kunye nokushukuma kunye nokunciphisa isampulu kunye nemithamo ye-reagent.

Ezinye iinkqubo eziphambili zezixhobo zemicrofluidic kunye neenkqubo zezi:

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- Iilebhu kwitshiphu

- Ukuhlolwa kweziyobisi

- Iimvavanyo zeGlucose

- Chemical microreactor

-Ukupholisa iMicroprocessor

- Iiseli zamafutha ezincinci

-Iprotein crystallization

- Iziyobisi ezikhawulezayo zitshintsha, ukunyanzeliswa kweeseli enye

- Izifundo zeseli enye

-Uluhlu lwe-optofluidic microlens olusenyongweni

-Microhydraulic & micropneumatic systems (iimpompo zolwelo,

iivalvu zegesi, iinkqubo zokuxuba... njl.

- Iinkqubo zokulumkisa kwangaphambili zeBiochip

- Ukufunyanwa kweentlobo zeekhemikhali

-Usetyenziso lweBioanalytical

- Kwi-chip DNA kunye nohlalutyo lweprotheyini

- Izixhobo zokutshiza ngombhobho

-Iiseli eziqukuqelayo zequartz zokukhangela ibhaktheriya

-Iitshiphusi ezimbini okanye ezininzi zokuvelisa amathontsi

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I-AGS-Engineering ikwabonelela ngokubonisana, ukuyila kunye nophuhliso lwemveliso kwiinkqubo zegesi kunye nezolwelo kunye neemveliso, kwimilinganiselo emincinci. Sisebenzisa izixhobo ezikumgangatho ophezulu zeComputational Fluid Dynamics (CFD) kunye novavanyo lwaselabhoratri ukuqonda kunye nombono wokuziphatha okuntsonkothileyo kokuhamba. Iinjineli zethu ze-microfluidics zisebenzise izixhobo ze-CFD kunye ne-microscopy ukubonisa i-microscale liquide transportation phenomena kwi-media ene-porous. Kananjalo sinentsebenziswano esondeleyo kunye nabasunguli bophando, ukuyila. Phuhlisa kwaye unikezele nge-microfluidic & bioMEMS components. Sinokukunceda uyile kwaye wenze iitshiphusi zakho zemicrofluidic. Iqela lethu lokuyila itshiphu elinamava linokukunceda ngoyilo, ukuchwetheza kunye nokwenza amaqashiso amancinci kunye nomthamo weetships zemicrofluidic kwisicelo sakho esithile. Ukuqala ngezixhobo kwiiplastiki kucetyiswa kwiimvavanyo ezikhawulezayo njengoko kuthatha ixesha elincinci kunye neendleko zokwenziwa xa kuthelekiswa nezixhobo kwi-PDMS. Sinokwenza iipateni zeMicrofluidic kwiiplastiki ezifana ne-PMMA, COC. Sinokwenza i-photolithography elandelwa yi-soft lithography ukwenza iipatheni ze-microfluidic kwi-PDMS. Sivelisa iinkosi zentsimbi, singoomatshini bokugaya kwiBrass kunye neAluminiyam. Ukwenziwa kwesixhobo kwi-PDMS kunye nokwenza iipatheni kwiiplastiki kunye neentsimbi kunokugqitywa kwiiveki ezimbalwa. Sinokubonelela ngeziqhagamshelo zeepatheni ezenziwe kwiiplastiki xa siceliwe njengeziqhagamshelo zezibuko ezihambelana nobukhulu bezibuko obuyi-1mm kunye nokulungelelaniswa kwetyhubhu ye-360 ye-micron ye-PEEK ye-capillary. I-mini luer eyindoda ene-metal pin assembly inokubonelelwa ukuze idibanise ityhubhu yetygon ye-0.5 mm yedayamitha yangaphakathi phakathi kwamazibuko olwelo kunye nempompo yesirinji. Iindawo zokugcina amanzi ezinomthamo we-100 μl. inokubonelelwa. Ukuba sele unoyilo, ungathumela kwi-Autocad, .dwg okanye .dxf iifomati.

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