MEMS​

MEMS, na-eguzo maka MicroElectroMechanical Systems bụ obere mgbawa ọnụ ọgụgụ micromachines nke mejupụtara ihe dị n'etiti 1 ruo 100 micrometers n'ịdị elu (otu micrometer bụ otu nde nke mita) na ngwaọrụ MEMS na-adịkarị n'ogo site na 20 micrometers_cc781905-5cde-3194-bb3b-158d_f. (20 nde otu mita) ruo otu millimita. Imirikiti ngwaọrụ MEMS bụ narị micron ole na ole gafee. Ha na-enwekarị akụkụ etiti na-ahazi data, microprocessor na ọtụtụ ihe ndị na-emekọrịta ihe n'èzí dị ka microsensors. N'ihe nha obere nha dị otú ahụ, iwu nke physics oge gboo anaghị aba uru mgbe niile. N'ihi nnukwu ebe MEMS na oke olu, mmetụta elu dị ka electrostatics na wetting na-achịkwa mmetụta olu dị ka inertia ma ọ bụ thermal mass. Yabụ, imewe na mmepe MEMS chọrọ ahụmịhe akọwapụtara n'ọhịa yana sọftụwia akọwapụtara nke na-eburu iwu physics ndị a na-abụghị oge gboo.

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MEMS ghọrọ ihe bara uru karịsịa n'ime iri afọ ole na ole gara aga mgbe enwere ike ịmepụta ha site na iji teknụzụ nrụpụta ngwaọrụ semiconductor gbanwetụrụ, nke a na-ejikarị eme ngwa eletrọnịkị. Ndị a na-agụnye ịkpụzi na plating, mmiri etching (KOH, TMAH) na akọrọ etching (RIE na DRIE), eletriki mwepu machining (EDM), mkpa film ntinye na teknụzụ ndị ọzọ nwere ike n'ichepụta nnọọ obere ngwaọrụ.

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Ọ bụrụ na ị nwere echiche MEMS ọhụrụ mana ị nwechaghị ngwaọrụ imewe na/ma ọ bụ nka kwesịrị ekwesị, anyị nwere ike inyere gị aka. Mgbe imewe, mmepe na imepụta ihe anyị nwere ike ịmepụta ngwaike nnwale ahaziri ahazi na ngwanrọ maka ngwaahịa MEMS gị. Anyị na-arụ ọrụ na ọtụtụ ntọala ntọala ndị ọkachamara na nrụpụta MEMS. A na-ahazi ma wafer 150mm na 200mm n'okpuru ISO/TS 16949 na ISO 14001 edebanye aha na gburugburu RoHS. Anyị na-enwe ike na-eme na-eduga ihu nnyocha, imewe, mmepe, ule, iru eru, prototyping nakwa dị ka elu olu azụmahịa mmepụta. Ụfọdụ ngwaọrụ MEMS ama ama ndị injinia anyị nwere ahụmịhe gụnyere:

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• Accelerometers

• Gyroscopes/ Gyros

• Magnetometers

• Igwe okwu

• Ndị na-emegharị ihe

• Ngwa anya MEMS(dị ka ndị na-eme ihe nkiri dijitalụ, ihe mgba ọkụ fiber optic niile)

• Ndị na-arụ ọrụ MEMSna ihe mmetụta (dị ka ihe mmetụta ngagharị, ihe mmetụta nrụgide)

• RF Switches & Varactors

• Ndị na-ewe ihe ubi

• Micro-bolometers

 

Obere ihe mmetụta MEMS na ndị na-eme ihe enyerela ọrụ ọhụrụ aka na smart ekwentị, mbadamba nkume, ụgbọ ala, projectors… wdg. ma dị oke egwu na ịntanetị nke ihe (IoT). N'aka nke ọzọ, MEMS na-enye ihe ịma aka injinịa pụrụ iche, gụnyere usoro mmepụta ihe na-abụghị ọkọlọtọ, mmekọrịta multi-physics, ntinye na ICs, yana chọrọ nkwakọ ngwaahịa hermetic omenala. Na-enweghị usoro nhazi ihe kpọmkwem MEMS, ọ na-ewe ọtụtụ afọ iji weta ngwaahịa MEMS n'ahịa. Anyị na-eji ngwá ọrụ dị elu na-emepụta na ịmepụta MEMS. Tanner MEMS Design na-enyere anyị aka imewe 3D MEMS na nkwado nrụpụta n'otu ebe jikọtara ọnụ, ma na-eme ka ọ dị mfe ijikọ ngwaọrụ MEMS na sekit nhazi nhazi analog / ngwakọta-signal na otu IC. Ọ na-akwalite nrụpụta nke ngwaọrụ MEMS site na igwe, thermal, acoustic, eletriki, electrostatic, magnetik na nyocha mmiri. Ngwa ngwanrọ ndị ọzọ sitere na Coventor na-enye anyị nyiwe dị ike maka imewe MEMS, ịme anwansị, nkwenye na nhazi usoro. Ikpo okwu Coventor na-eleba anya ihe ịma aka injinịa akọwapụtara nke MEMS dị ka mmekọrịta multi-physics, mgbanwe usoro, ntinye MEMS+IC, mmekọrịta ngwungwu MEMS. Ndị injinia MEMS anyị nwere ike ịṅomi na ịmegharị omume na mmekọrịta tupu ha emee ihe n'ezie, na n'ime awa ma ọ bụ ụbọchị, ha nwere ike ịṅomi ma ọ bụ mee ka mmetụta ndị ga-ewekarị ọnwa nke iwu na ule na fab. Ụfọdụ n'ime ngwaọrụ ndị dị elu ndị na-emepụta MEMS anyị na-eji bụ ndị a.

 

Maka ịme anwansị:

• Tanner MEMS Design Na-asọ site na Mentor

• MEMS+, CoventorWare, SEMulator3D sitere na Coventor

• IntelliSense

• Comsol MEMS Module

• Azịza

 

Maka ịse ihe mkpuchi:

• AutoCAD

• Vectorworks

• Nhazi nhazi

 

Maka imepụta ihe:

• Ọrụ siri ike

 

Maka ngụkọ, nyocha, nyocha ọnụọgụgụ:

• Matlab

• MathCAD

• mgbakọ na mwepụ

 

Ihe a bụ ndepụta dị nkenke nke imewe na ọrụ mmepe MEMS anyị na-arụ:

• Mepụta ụdị MEMS 3D site na nhazi

• Nyochaa iwu imewe maka nrụpụta MEMS

• Simulation ọkwa sistemụ nke ngwaọrụ MEMS na imewe IC

• Nhụta geometry zuru oke & imewe

• Ọgbọ okirikiri nhọrọ ukwuu nwere mkpụrụ ndụ parameterized

• Ọgbọ ụdị omume nke ngwaọrụ MEMS gị

• Nhazi nkpuchi dị elu na ntinye nkwenye

• Mbupụ faịlụ DXF   

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MICROFLUIDICS

Nhazi ngwaọrụ microfluidics anyị na ọrụ mmepe bụ iji mepụta ngwaọrụ na sistemu nke a na-ejikwa obere mpịakọta mmiri. Anyị nwere ike chepụta ngwaọrụ microfluidic maka gị ma na-enye prototyping & micromanufacturing omenala ahaziri maka ngwa gị. Ihe atụ nke ngwaọrụ microfluidic bụ ngwaọrụ micro-propulsion, sistemu lab-on-a-chip, ngwaọrụ micro-thermal, inkjet printheads na ndị ọzọ. Na microfluidics anyị ga-emeso njikwa ziri ezi na nhazi nke mmiri ndị a na-amachibido na mpaghara sub-milimita. A na-ebugharị mmiri mmiri, agwakọta, kewaa ma hazie ya. N'ime sistemu microfluidic, a na-ebugharị ma na-achịkwa mmiri mmiri ma ọ bụ na-arụsi ọrụ ike na-eji obere micropumps na microvalves na ihe ndị yiri ya ma ọ bụ na-eji ohere nke ike capillary eme ihe. Site na sistemu lab-on-a-chip, usoro a na-emekarị n'ụlọ nyocha na-adị ntakịrị ntakịrị n'otu mgbawa iji kwalite arụmọrụ na ngagharị yana ibelata sample na reagent mpịakọta.

Ụfọdụ isi ngwa nke ngwaọrụ na sistemu microfluidic bụ:

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- Laboratories na mgbawa

- Nyocha ọgwụ

- Nnwale glucose

- Chemical microreactor

- Microprocessor jụrụ oyi

- Micro mmanụ ụgbọala cell

- Protein crystallization

- Mgbanwe ọgwụ ngwa ngwa, na-emegharị otu mkpụrụ ndụ

- Ọmụmụ otu mkpụrụ ndụ

- Optofluidic microlens arrays

- Microhydraulic & sistemụ micropneumatic (nfuli mmiri mmiri,

valvụ gas, ngwakọta usoro… wdg)

- Sistemụ ịdọ aka ná ntị mbụ nke Biochip

- Nchọpụta ụdị kemịkal

- Ngwa bioanalytical

- DNA on-chip na nyocha protein

- ngwaọrụ ịgba mmiri nozzle

- Quartz eruba cell maka nchọpụta nke nje bacteria

- Abụọ ma ọ bụ multiple droplet ọgbọ ibe

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AGS-Engineering na-enyekwa ndụmọdụ, imewe na mmepe ngwaahịa na gas na usoro mmiri mmiri na ngwaahịa, na obere akpịrịkpa. Anyị na-eji ngwa Compputational Fluid Dynamics (CFD) dị elu yana nnwale ụlọ nyocha iji ghọta na iji anya nke uche hụ omume ịgba ọsọ dị mgbagwoju anya. Ndị injinia microfluidics anyị ejirila ngwa CFD na microscopy mara ihe nhụsianya mbufe mmiri microscale na mgbasa ozi porous. Anyị na-enwekwa mmekọrịta chiri anya na ntọala maka nyocha, imewe. Zụlite ma weta ihe microfluidic & bioMEMS. Anyị nwere ike inyere gị aka chepụta & mepụta ibe microfluidic nke gị. Ndị otu anyị na-emepụta mgbawa nwere ahụmahụ nwere ike inyere gị aka site na imewe, imepụta na imepụta obere nza na ọnụ ọgụgụ microfluidic ibe maka ngwa gị. Malite na ngwaọrụ dị na rọbas ka akwadoro maka nnwale ngwa ngwa ka ọ na-ewe obere oge na ọnụ ahịa maka nrụpụta ma e jiri ya tụnyere ngwaọrụ dị na PDMS. Anyị nwere ike ịmepụta ụkpụrụ Microfluidic na plastik dị ka PMMA, COC. Anyị nwere ike ịme fotolithography na-esote lithography dị nro iji mepụta ụkpụrụ microfluidic na PDMS. Anyị na-emepụta nna ukwu metal, anyị bụ site na-egwe ọka ụkpụrụ na Brass na Aluminom. Nrụpụta ngwaọrụ na PDMS na ịme ụkpụrụ na plastik na ọla nwere ike mechaa n'ime izu ole na ole. Anyị nwere ike ịnye njikọ maka ụkpụrụ arụpụtara na rọba mgbe a rịọrọ ya dị ka njikọ ọdụ ụgbọ mmiri dakọtara maka nha ọdụ ụgbọ mmiri 1mm yana dabara adaba iji jikọọ 360 micron PEEK capillary tubes. Enwere ike ịnye nwoke obere luer nwere mgbakọ ntụtụ igwe iji jikọọ tube tygon nke dayameta dị 0.5 mm n'etiti ọdụ ụgbọ mmiri na mgbapụta sirinji. Mmiri nchekwa mmiri nke ike 100 μl. nwekwara ike inye. Ọ bụrụ na i nweburu imewe, ị nwere ike ịnyefe na ụdị Autocad, .dwg ma ọ bụ .dxf.

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